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		<title>区域化 on Advanced Infrared Heating Systems</title>
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			<lastBuildDate>Wed, 03 Jun 2026 01:35:17 +0800</lastBuildDate>
		
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				<title>先进晶圆厂的分区加热</title>
				<link>http://ir-heater-system.com/zh/posts/zoned-heating-for-advanced-wafer-fab/</link>
				<pubDate>Wed, 03 Jun 2026 01:35:17 +0800</pubDate>
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				<description>&lt;p&gt;&lt;img src=&#34;http://ir-heater-system.com/images/0a976f8a438e1a813cc995e9355a4471.png&#34; alt=&#34;先进晶圆厂的分区加热&#34;&gt;&lt;/p&gt;&#xA;&lt;p&gt;在晶圆厂车间，烘烤温度仅偏移半度就足以报废整批产品。你会观察到光刻胶轮廓变化，在计量环节出现关键尺寸偏差，产量损失直接反映在你的班次报告中。&lt;br&gt;&#xA;传统烤箱和单区热板迫使你在热预算和产能之间做出权衡。我们采用分区加热，避免了这种妥协。&lt;/p&gt;</description>
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