Below you will find pages that utilize the taxonomy term “TEL” TEL (Tokyo Electron) heater lamp Out on the lithography floor, a 1°C drift during the photoresist bake is all it takes to turn a good lot into scrap. You need heat that hits the... Read more...
TEL (Tokyo Electron) heater lamp Out on the lithography floor, a 1°C drift during the photoresist bake is all it takes to turn a good lot into scrap. You need heat that hits the... Read more...
