Mattson RTP lamp replacement

Mon, 01 Jun 2026 17:55:39 +0800

On the fab floor, a drifting lamp profile doesn’t throw alarms. It shows up as a 0.3°C hotspot across the wafer, a slow wander in critical dimension, and photoresist that just won’t bake evenly. When the Mattson RTP tool ages, thermal uniformity is the first thing to slip. The replacement lamps we run are built to pull that drift back and put process control where it belongs. The technical heart of it is infrared heating precision. We match the Mattson chamber geometry with short-wave infrared sources, hitting sub-millimeter uniformity across the wafer plane and repeatable temperature profiles run after run. The lamp array is calibrated to hold ±0.1°C across the active zone, so your soft bake and hard bake steps keep the thermal budget lithography demands. You get output stability over 5,000+ hours, with less than 5% intensity drop, and zero particle generation during ramp and soak. Cleanroom Class 1–100 compatibility is baked into the design, with sealed quartz components and clean-handling interfaces that keep contamination out of the process stream. Here is why it matters on the line: fewer qualification lots, tighter window margins, and lower energy use thanks to efficient lamp response and fast settling. Photoresist profiles stay consistent, which cuts rework and protects yield. The replacement drops into the Mattson platform with the right connectors and mounting tolerances, so installation is straightforward and downtime stays short. A couple of things to keep in mind. Lamp life takes a hit with power cycling and if coolant temperature isn’t stable. Plan the swap around scheduled PM windows, check the chamber reflector condition, and confirm the power supply calibration after install to keep uniformity within spec.

Mattson on Advanced Infrared Heating Systems

Mattson RTP lamp replacement